Abstract: Eco-efficiency is one of the better indicators for measuring industrial environmental performance, and it is related to several factors such as economic development, industrial structure, opening to the outside world, environmental regulation, scientific and technological change and energy inputs, etc. The empirical results of provincial industry in China based on inter-temporal DEA-Tobit model are as the following:the industrial environmental performance is generally poor, its provincial difference is large and this kind of regional distribution pattern doesn't vary significantly;provincial economic development level(including economic development scale and industrial structure), enterprise scale structure, degree of opening to the outside world and environmental regulation level are positively correlated to industrial environmental performance, while industrial structure and energy inputs intensity have negative correlation to it, and the influence of investment level in science and technology is not clear.